High Temperature HEPA Filter for Semiconductor oven

Description

High Temperature HEPA Filter for Semiconductor oven

Air conditioner high-temperature resistant filter is suitable for ultra-clean ovens that require drying or high-temperature air purification systems and is mainly used to filter air particles below 0.3um. The organic silica gel and inorganic glue used in the high-temperature resistant filter are cured from the surface to the inside during the curing process. The thicker the glue injection height is, the harder it is to cure. Under normal circumstances, the glue curing time is 3-7 days. Of course, in the process of use, some precautions need to be observed. If the work intensity is relatively high, to prolong the service life and reduce the workload during use, a pre-filter environment can be added. Our high-temperature HEPA is Widely used in the spraying industry, oven Especially in semiconductor ovens, chemical, ultrasonic industry, and other high-temperature purification sites. And the filter can withstand temperatures up to 350°C. It uses stainless steel as the frame and glass fiber filter paper as the filter material. 

High-Temperature HEPA Filter for Semiconductor oven

 250℃ high-temperature resistant filter

Main applications: high-temperature purification equipment, process equipment, and some special process high-temperature air supply systems, such as pharmaceutical, medical, chemical, and other industries.

Efficiency: H13≥99.95%@0.3μm (normal temperature)

Filter material separation: aluminum foil corrugated plate

Filter material: glass fiber filter paper

Continuous operating temperature: ≤250℃

Gasket: high-temperature resistant silicone rubber

Humidity: ≤100% RH

Sealant: high-temperature resistant silicone

Recommended maximum final resistance: 500Pa

350℃ high-temperature resistant filter

Main applications: some high-temperature resistant purification equipment, process equipment, some special process high-temperature air supply systems,

High-temperature sterilization tunnels, such as pharmaceutical, medical, chemical, and other industries.

Efficiency: H13≥99.95%@0.3μm (normal temperature)

Filter material separation: aluminum foil corrugated plate

Filter material: glass fiber filter paper

Continuous operating temperature: ≤350℃

Gasket: glass fiber

Humidity: ≤100% RH

Sealant: ceramic glue

Recommended maximum final resistance: 500Pa